Fabrication and characterization of sub polymeric microring resonators for biosensors
In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam litho...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/12513/ http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf |
| _version_ | 1848777448029683712 |
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| author | Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew |
| author_facet | Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew |
| author_sort | Mohd Salleh, Mohd Hazimin |
| building | IIUM Repository |
| collection | Online Access |
| description | In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress. |
| first_indexed | 2025-11-14T14:46:08Z |
| format | Proceeding Paper |
| id | iium-12513 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:46:08Z |
| publishDate | 2009 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-125132012-05-18T00:41:21Z http://irep.iium.edu.my/12513/ Fabrication and characterization of sub polymeric microring resonators for biosensors Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew Q Science (General) QC Physics In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress. 2009 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf Mohd Salleh, Mohd Hazimin and Cooper, Jonathan M and Glidle, Andrew (2009) Fabrication and characterization of sub polymeric microring resonators for biosensors. In: 5th IEEE EMBS UK & Republic of Ireland Postgraduate Conference on Biomedical Engineering and Medical Physics, 12th - 14th July, 2009, Oxford University. |
| spellingShingle | Q Science (General) QC Physics Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title | Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title_full | Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title_fullStr | Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title_full_unstemmed | Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title_short | Fabrication and characterization of sub polymeric microring resonators for biosensors |
| title_sort | fabrication and characterization of sub polymeric microring resonators for biosensors |
| topic | Q Science (General) QC Physics |
| url | http://irep.iium.edu.my/12513/ http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf |