Investigation of modified nanopore arrays using FIB/SEM tomography

The investigation of electrochemical processes at the interface of two immiscible electrolyte solutions (ITIES) is of great interest for sensing applications, and serves as a surrogate to the study of biological transport phenomena, e.g. ion channels. Alongside e-beam lithography, focused ion beam (...

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Main Authors: Holzinger, A., Neusser, G., Austen, B., Gamero-Quijano, A., Herzog, G., Arrigan, Damien, Ziegler, A., Walther, P., Kranz, C.
Format: Journal Article
Published: R S C Publications 2018
Online Access:http://purl.org/au-research/grants/arc/DP130102040
http://hdl.handle.net/20.500.11937/72686
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author Holzinger, A.
Neusser, G.
Austen, B.
Gamero-Quijano, A.
Herzog, G.
Arrigan, Damien
Ziegler, A.
Walther, P.
Kranz, C.
author_facet Holzinger, A.
Neusser, G.
Austen, B.
Gamero-Quijano, A.
Herzog, G.
Arrigan, Damien
Ziegler, A.
Walther, P.
Kranz, C.
author_sort Holzinger, A.
building Curtin Institutional Repository
collection Online Access
description The investigation of electrochemical processes at the interface of two immiscible electrolyte solutions (ITIES) is of great interest for sensing applications, and serves as a surrogate to the study of biological transport phenomena, e.g. ion channels. Alongside e-beam lithography, focused ion beam (FIB) milling is an attractive method to prototype and fabricate nanopore arrays that support nanoITIES. Within this contribution, we explore the capability of FIB/scanning electron microscopy (SEM) tomography to visualize the actual pore structure and interfaces at silica-modified nanoporous membranes. The nanopores were also characterized by atomic force microscopy (AFM) using ultra-sharp AFM probes to determine the pore diameter, and using scanning transmission electron microscopy (STEM) and energy dispersive X-ray (EDX) spectroscopy, providing additional information on the elemental composition of deposits within the pores. Si-rich particles could be identified within the pores as well as at the orifice that had faced the organic electrolyte solution during electrochemical deposition. The prospects of the used techniques for investigating the interface at or within FIB-milled nanopores will be discussed.
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institution Curtin University Malaysia
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last_indexed 2025-11-14T10:53:34Z
publishDate 2018
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spelling curtin-20.500.11937-726862022-10-06T06:48:56Z Investigation of modified nanopore arrays using FIB/SEM tomography Holzinger, A. Neusser, G. Austen, B. Gamero-Quijano, A. Herzog, G. Arrigan, Damien Ziegler, A. Walther, P. Kranz, C. The investigation of electrochemical processes at the interface of two immiscible electrolyte solutions (ITIES) is of great interest for sensing applications, and serves as a surrogate to the study of biological transport phenomena, e.g. ion channels. Alongside e-beam lithography, focused ion beam (FIB) milling is an attractive method to prototype and fabricate nanopore arrays that support nanoITIES. Within this contribution, we explore the capability of FIB/scanning electron microscopy (SEM) tomography to visualize the actual pore structure and interfaces at silica-modified nanoporous membranes. The nanopores were also characterized by atomic force microscopy (AFM) using ultra-sharp AFM probes to determine the pore diameter, and using scanning transmission electron microscopy (STEM) and energy dispersive X-ray (EDX) spectroscopy, providing additional information on the elemental composition of deposits within the pores. Si-rich particles could be identified within the pores as well as at the orifice that had faced the organic electrolyte solution during electrochemical deposition. The prospects of the used techniques for investigating the interface at or within FIB-milled nanopores will be discussed. 2018 Journal Article http://hdl.handle.net/20.500.11937/72686 10.1039/c8fd00019k http://purl.org/au-research/grants/arc/DP130102040 http://creativecommons.org/licenses/by-nc/3.0/ R S C Publications fulltext
spellingShingle Holzinger, A.
Neusser, G.
Austen, B.
Gamero-Quijano, A.
Herzog, G.
Arrigan, Damien
Ziegler, A.
Walther, P.
Kranz, C.
Investigation of modified nanopore arrays using FIB/SEM tomography
title Investigation of modified nanopore arrays using FIB/SEM tomography
title_full Investigation of modified nanopore arrays using FIB/SEM tomography
title_fullStr Investigation of modified nanopore arrays using FIB/SEM tomography
title_full_unstemmed Investigation of modified nanopore arrays using FIB/SEM tomography
title_short Investigation of modified nanopore arrays using FIB/SEM tomography
title_sort investigation of modified nanopore arrays using fib/sem tomography
url http://purl.org/au-research/grants/arc/DP130102040
http://hdl.handle.net/20.500.11937/72686