Carbon diffusion in alumina from carbon and Ti2AlC thin films

Carbon diffusion is observed in single crystal a-Al2O3 substrates from carbon and Ti2AlC thin filmssynthesized via pulsed cathodic arc deposition. Diffusion was found to occur at substratetemperatures of 570 C and above. The diffusion coefficient of carbon in a-Al2O3 is estimated to beof the order 3...

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Main Authors: Guenette, M., Tucker, Mark, Ionescu, M., Bilek, M., McKenzie, D.
Format: Journal Article
Published: American Institute of Physics 2011
Online Access:http://hdl.handle.net/20.500.11937/6561
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author Guenette, M.
Tucker, Mark
Ionescu, M.
Bilek, M.
McKenzie, D.
author_facet Guenette, M.
Tucker, Mark
Ionescu, M.
Bilek, M.
McKenzie, D.
author_sort Guenette, M.
building Curtin Institutional Repository
collection Online Access
description Carbon diffusion is observed in single crystal a-Al2O3 substrates from carbon and Ti2AlC thin filmssynthesized via pulsed cathodic arc deposition. Diffusion was found to occur at substratetemperatures of 570 C and above. The diffusion coefficient of carbon in a-Al2O3 is estimated to beof the order 3 1013 cm2/s for deposition temperatures in the 570–770 C range by examiningelastic recoil detection analysis (ERDA) elemental depth profiles. It is suggested that an appropriatediffusion barrier may be useful when depositing carbon containing thin films on a-Al2O3 substratesat high temperatures.
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institution Curtin University Malaysia
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publishDate 2011
publisher American Institute of Physics
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spelling curtin-20.500.11937-65612017-09-13T16:06:09Z Carbon diffusion in alumina from carbon and Ti2AlC thin films Guenette, M. Tucker, Mark Ionescu, M. Bilek, M. McKenzie, D. Carbon diffusion is observed in single crystal a-Al2O3 substrates from carbon and Ti2AlC thin filmssynthesized via pulsed cathodic arc deposition. Diffusion was found to occur at substratetemperatures of 570 C and above. The diffusion coefficient of carbon in a-Al2O3 is estimated to beof the order 3 1013 cm2/s for deposition temperatures in the 570–770 C range by examiningelastic recoil detection analysis (ERDA) elemental depth profiles. It is suggested that an appropriatediffusion barrier may be useful when depositing carbon containing thin films on a-Al2O3 substratesat high temperatures. 2011 Journal Article http://hdl.handle.net/20.500.11937/6561 10.1063/1.3573490 American Institute of Physics restricted
spellingShingle Guenette, M.
Tucker, Mark
Ionescu, M.
Bilek, M.
McKenzie, D.
Carbon diffusion in alumina from carbon and Ti2AlC thin films
title Carbon diffusion in alumina from carbon and Ti2AlC thin films
title_full Carbon diffusion in alumina from carbon and Ti2AlC thin films
title_fullStr Carbon diffusion in alumina from carbon and Ti2AlC thin films
title_full_unstemmed Carbon diffusion in alumina from carbon and Ti2AlC thin films
title_short Carbon diffusion in alumina from carbon and Ti2AlC thin films
title_sort carbon diffusion in alumina from carbon and ti2alc thin films
url http://hdl.handle.net/20.500.11937/6561