Computational Study of Surface Deposition and Gas Phase Powder Formation during Spinel Chemical Vapor Deposition Processes

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Computational Study of Surface Deposition and Gas Phase Powder Formation during Spinel Chemical Vapor Deposition Processes

Chemical vapor deposition (CVD) processes are often employed to produce high quality materials. In some applications, a relatively fast deposition rate is required to produce thick pieces of material, e.g., on the order of centimeter, in an economical manner. However, in some processes the formation...

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Bibliographic Details
Main Authors:	Wang, H., Stern, H., Chakraborty, D., Bai, H., DiFilippo, V., Goela, J., Pickering, M., Gale, Julian
Format:	Journal Article
Published:	American Chemical Society 2013
Online Access:	http://hdl.handle.net/20.500.11937/5855

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