Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography
Laser-pulsed atom probe tomography is introduced as a novel tomographic technique and its basic principles are explained. Atom probe provides 3-dimensional chemical maps with nanoscale resolution. For semiconductor research, needle-shaped atom probe samples are produced by focused ion beam lift-out...
| Main Authors: | , , , |
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| Format: | Conference Paper |
| Published: |
2010
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| Online Access: | http://hdl.handle.net/20.500.11937/35019 |
| _version_ | 1848754382030503936 |
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| author | Müller, M. Saxey, David Cerezo, A. Smith, G. |
| author_facet | Müller, M. Saxey, David Cerezo, A. Smith, G. |
| author_sort | Müller, M. |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | Laser-pulsed atom probe tomography is introduced as a novel tomographic technique and its basic principles are explained. Atom probe provides 3-dimensional chemical maps with nanoscale resolution. For semiconductor research, needle-shaped atom probe samples are produced by focused ion beam lift-out and annular milling. An InAs buried quantum dot material was studied using laser-pulsed atom probe. The dot size, morphology and composition were evaluated as well as the wetting layers and interface composition. A laterally shifted In-rich core was visualised within the dots. Furthermore, a GeMn-based thin film was investigated to better-understand the mechanisms leading to the magnetic characteristics of this material system, which has potential applications as a magnetic semiconductor. We conclude that laser-pulsed atom probe has great potential for compound semiconductor research. © 2010 IOP Publishing Ltd. |
| first_indexed | 2025-11-14T08:39:31Z |
| format | Conference Paper |
| id | curtin-20.500.11937-35019 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T08:39:31Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-350192017-09-13T15:28:49Z Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography Müller, M. Saxey, David Cerezo, A. Smith, G. Laser-pulsed atom probe tomography is introduced as a novel tomographic technique and its basic principles are explained. Atom probe provides 3-dimensional chemical maps with nanoscale resolution. For semiconductor research, needle-shaped atom probe samples are produced by focused ion beam lift-out and annular milling. An InAs buried quantum dot material was studied using laser-pulsed atom probe. The dot size, morphology and composition were evaluated as well as the wetting layers and interface composition. A laterally shifted In-rich core was visualised within the dots. Furthermore, a GeMn-based thin film was investigated to better-understand the mechanisms leading to the magnetic characteristics of this material system, which has potential applications as a magnetic semiconductor. We conclude that laser-pulsed atom probe has great potential for compound semiconductor research. © 2010 IOP Publishing Ltd. 2010 Conference Paper http://hdl.handle.net/20.500.11937/35019 10.1088/1742-6596/209/1/012026 unknown |
| spellingShingle | Müller, M. Saxey, David Cerezo, A. Smith, G. Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title | Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title_full | Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title_fullStr | Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title_full_unstemmed | Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title_short | Nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| title_sort | nanoscale characterization of compound semiconductors using laser-pulsed atom probe tomography |
| url | http://hdl.handle.net/20.500.11937/35019 |