Synthesis and characterisation of chemical bath deposited TiO2 thin-films
A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500°C for 4h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO2 thin films wa...
| Main Authors: | , , , |
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| Format: | Journal Article |
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Elsevier Science Ltd
2013
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| Online Access: | http://hdl.handle.net/20.500.11937/29345 |
| _version_ | 1848752778572201984 |
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| author | Manurung, P. Putri, Y. Simanjuntak, W. Low, It Meng |
| author_facet | Manurung, P. Putri, Y. Simanjuntak, W. Low, It Meng |
| author_sort | Manurung, P. |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500°C for 4h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO2 thin films was characterised using X-ray diffraction, scanning electron microscopy and four-point probe respectively. Results showed that TiO2 films produced by single deposition cycle were amorphous. In contrast, those produced by 5 and 6 deposition cycles were partly amorphous and partly crystalline with the formation of rutile. Both the film thickness and electrical resistivity increased with an increase in the number of deposition cycles. |
| first_indexed | 2025-11-14T08:14:02Z |
| format | Journal Article |
| id | curtin-20.500.11937-29345 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T08:14:02Z |
| publishDate | 2013 |
| publisher | Elsevier Science Ltd |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-293452019-02-19T04:27:41Z Synthesis and characterisation of chemical bath deposited TiO2 thin-films Manurung, P. Putri, Y. Simanjuntak, W. Low, It Meng Chemical bath deposition Rutile B. Microstructure Amorphous A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500°C for 4h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO2 thin films was characterised using X-ray diffraction, scanning electron microscopy and four-point probe respectively. Results showed that TiO2 films produced by single deposition cycle were amorphous. In contrast, those produced by 5 and 6 deposition cycles were partly amorphous and partly crystalline with the formation of rutile. Both the film thickness and electrical resistivity increased with an increase in the number of deposition cycles. 2013 Journal Article http://hdl.handle.net/20.500.11937/29345 10.1016/j.ceramint.2012.06.019 Elsevier Science Ltd fulltext |
| spellingShingle | Chemical bath deposition Rutile B. Microstructure Amorphous Manurung, P. Putri, Y. Simanjuntak, W. Low, It Meng Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title | Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title_full | Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title_fullStr | Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title_full_unstemmed | Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title_short | Synthesis and characterisation of chemical bath deposited TiO2 thin-films |
| title_sort | synthesis and characterisation of chemical bath deposited tio2 thin-films |
| topic | Chemical bath deposition Rutile B. Microstructure Amorphous |
| url | http://hdl.handle.net/20.500.11937/29345 |