Production, characterization and application of silicon-on-sapphire wafers

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Production, characterization and application of silicon-on-sapphire wafers

Silicon-on-sapphire (SOS) thin film systems have had specific electronic applications because they can reduce noise and current leakage in metal oxide semiconductor transistors. However, there are some issues in producing defect-free SOS wafers. Dislocations, misfit, micro twins and residual stresse...

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Bibliographic Details
Main Authors:	Pramanik, Alokesh, Zhang, L., Liu, M.
Format:	Journal Article
Published:	Trans Tech Publications 2010
Subjects:	residual stress thin film Silicon on sapphire defects
Online Access:	http://hdl.handle.net/20.500.11937/25303

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