High-speed optical microscanner driven with resonation of Lam Waves using Pb(Zr.Ti)O3 thick films formed by aerosol deposition

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High-speed optical microscanner driven with resonation of Lam Waves using Pb(Zr.Ti)O3 thick films formed by aerosol deposition

Bibliographic Details
Main Authors:	Akedo, J., Lebedev, Maxim, Sato, H., Park, J.
Format:	Journal Article
Published:	Japan Society of Applied Physics 2005
Online Access:	http://hdl.handle.net/20.500.11937/23627

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