Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering

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Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering

Tetrahedral amorphous carbon films with an sp 3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots m...

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Bibliographic Details
Main Authors:	Ganesan, R., McCulloch, D., Marks, Nigel, Tucker, M., Partridge, J., Bilek, M., McKenzie, D.
Format:	Journal Article
Published:	2015
Online Access:	http://hdl.handle.net/20.500.11937/18045

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