Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering
Tetrahedral amorphous carbon films with an sp 3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots m...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Journal Article |
| Published: |
2015
|
| Online Access: | http://hdl.handle.net/20.500.11937/18045 |
| _version_ | 1848749631832326144 |
|---|---|
| author | Ganesan, R. McCulloch, D. Marks, Nigel Tucker, M. Partridge, J. Bilek, M. McKenzie, D. |
| author_facet | Ganesan, R. McCulloch, D. Marks, Nigel Tucker, M. Partridge, J. Bilek, M. McKenzie, D. |
| author_sort | Ganesan, R. |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | Tetrahedral amorphous carbon films with an sp 3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots move rapidly, inhibiting the formation of macroparticles. An argon pressure below 2.5 mTorr was critical for obtaining films with high sp 3 content, high stress, large Tauc gap and symmetrical Raman spectra, and all four quantities were strongly correlated. |
| first_indexed | 2025-11-14T07:24:01Z |
| format | Journal Article |
| id | curtin-20.500.11937-18045 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T07:24:01Z |
| publishDate | 2015 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-180452019-02-19T05:34:54Z Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering Ganesan, R. McCulloch, D. Marks, Nigel Tucker, M. Partridge, J. Bilek, M. McKenzie, D. Tetrahedral amorphous carbon films with an sp 3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots move rapidly, inhibiting the formation of macroparticles. An argon pressure below 2.5 mTorr was critical for obtaining films with high sp 3 content, high stress, large Tauc gap and symmetrical Raman spectra, and all four quantities were strongly correlated. 2015 Journal Article http://hdl.handle.net/20.500.11937/18045 10.1088/0022-3727/48/44/442001 fulltext |
| spellingShingle | Ganesan, R. McCulloch, D. Marks, Nigel Tucker, M. Partridge, J. Bilek, M. McKenzie, D. Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title | Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title_full | Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title_fullStr | Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title_full_unstemmed | Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title_short | Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering |
| title_sort | synthesis of highly tetrahedral amorphous carbon by mixed-mode hipims sputtering |
| url | http://hdl.handle.net/20.500.11937/18045 |