Reaction paths of phosphine dissociation on silicon (001)

Using density functional theory and guided by extensive scanning tunneling microscopy (STM) image data, we formulate a detailed mechanism for the dissociation of phosphine (PH3) molecules on the Si(001) surface at room temperature. We distinguish between a main sequence of dissociation that involves...

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Main Authors: Warschkow, O., Curson, N., Schofield, S., Marks, Nigel, Wilson, H., Radny, M., Smith, P., Reusch, T., McKenzie, D., Simmons, M.
Format: Journal Article
Published: 2016
Online Access:http://hdl.handle.net/20.500.11937/17389
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author Warschkow, O.
Curson, N.
Schofield, S.
Marks, Nigel
Wilson, H.
Radny, M.
Smith, P.
Reusch, T.
McKenzie, D.
Simmons, M.
author_facet Warschkow, O.
Curson, N.
Schofield, S.
Marks, Nigel
Wilson, H.
Radny, M.
Smith, P.
Reusch, T.
McKenzie, D.
Simmons, M.
author_sort Warschkow, O.
building Curtin Institutional Repository
collection Online Access
description Using density functional theory and guided by extensive scanning tunneling microscopy (STM) image data, we formulate a detailed mechanism for the dissociation of phosphine (PH3) molecules on the Si(001) surface at room temperature. We distinguish between a main sequence of dissociation that involves PH2+H, PH+2H, and P+3H as observable intermediates, and a secondary sequence that gives rise to PH+H, P+2H, and isolated phosphorus adatoms. The latter sequence arises because PH2 fragments are surprisingly mobile on Si(001) and can diffuse away from the third hydrogen atom that makes up the PH3 stoichiometry. Our calculated activation energies describe the competition between diffusion and dissociation pathways and hence provide a comprehensive model for the numerous adsorbate species observed in STM experiments.
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publishDate 2016
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spelling curtin-20.500.11937-173892017-09-13T15:43:07Z Reaction paths of phosphine dissociation on silicon (001) Warschkow, O. Curson, N. Schofield, S. Marks, Nigel Wilson, H. Radny, M. Smith, P. Reusch, T. McKenzie, D. Simmons, M. Using density functional theory and guided by extensive scanning tunneling microscopy (STM) image data, we formulate a detailed mechanism for the dissociation of phosphine (PH3) molecules on the Si(001) surface at room temperature. We distinguish between a main sequence of dissociation that involves PH2+H, PH+2H, and P+3H as observable intermediates, and a secondary sequence that gives rise to PH+H, P+2H, and isolated phosphorus adatoms. The latter sequence arises because PH2 fragments are surprisingly mobile on Si(001) and can diffuse away from the third hydrogen atom that makes up the PH3 stoichiometry. Our calculated activation energies describe the competition between diffusion and dissociation pathways and hence provide a comprehensive model for the numerous adsorbate species observed in STM experiments. 2016 Journal Article http://hdl.handle.net/20.500.11937/17389 10.1063/1.4939124 fulltext
spellingShingle Warschkow, O.
Curson, N.
Schofield, S.
Marks, Nigel
Wilson, H.
Radny, M.
Smith, P.
Reusch, T.
McKenzie, D.
Simmons, M.
Reaction paths of phosphine dissociation on silicon (001)
title Reaction paths of phosphine dissociation on silicon (001)
title_full Reaction paths of phosphine dissociation on silicon (001)
title_fullStr Reaction paths of phosphine dissociation on silicon (001)
title_full_unstemmed Reaction paths of phosphine dissociation on silicon (001)
title_short Reaction paths of phosphine dissociation on silicon (001)
title_sort reaction paths of phosphine dissociation on silicon (001)
url http://hdl.handle.net/20.500.11937/17389