Review of micromachining of ceramics by etching

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Review of micromachining of ceramics by etching

Bibliographic Details
Main Authors:	Ting, Huey tze, Abou-El-Hossein, K., Chua, Han
Format:	Journal Article
Published:	China University Press 2009
Online Access:	http://hdl.handle.net/20.500.11937/12692

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