Oriented graphite layer formation in Ti/C and TiC/C multilayers deposited by high current pulsed cathodic arc

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Oriented graphite layer formation in Ti/C and TiC/C multilayers deposited by high current pulsed cathodic arc

Ti/C and TiC/C multilayers with periods ranging from 2 to 18 nm were grown by filtered highcurrent pulsed cathodic arc. The growth was monitored in situ by ellipsometry and cantilever stressmeasurements. The ellipsometry results reveal that the optical properties of the carbon vary as afunction of t...

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Bibliographic Details
Main Authors:	Persson, P., Ryves, L., Tucker, Mark, McKenzie, D., Bilek, M.
Format:	Journal Article
Published:	American Institute of Physics 2008
Online Access:	http://hdl.handle.net/20.500.11937/12519

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