Review of Micromachining of Ceramics by Etching

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Review of Micromachining of Ceramics by Etching

In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness...

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Bibliographic Details
Main Author:	Chua, Han
Other Authors:	Chairman Hymap 2008 - Prof Kwang
Format:	Conference Paper
Published:	National Core Research Center for Hybrid Materials Solutions Korea 2008
Online Access:	http://hdl.handle.net/20.500.11937/10992

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