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Teh, E. P.
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1
Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field
by
Lee, W. P.
,
Teh, E. P
.
,
Yow, H. K.
,
Choong, C. L.
,
Tou, T. Y.
Published 2005
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2
Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon
by
Lee, W. P.
,
Teh, E. P
.
,
Yow, H. K.
,
Choong, C. L.
,
Tou, T. Y.
Published 2004
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