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Recht, F.
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Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures
by
Kocan, M.
,
Umana-Membreno, G.
,
Kilburn, M.
,
Fletcher, Ian
,
Recht, F
.
,
McCarthy, L.
,
Mishra, U.
,
Nener, B.
,
Parish, G.
Published 2008
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