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Lee, W.-P.
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1
Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic...
by
Lee, W.-P
.
,
Yow, H.-K.
,
Tou, T.-Y.
Published 2004
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2
Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers
by
Lee, W. P
.
,
Yow, H. K.
,
Tou, T. Y.
Published 2006
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3
Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers
by
Lee, W. P
.
,
Yow, H. K.
,
Tou, T. Y.
Published 2004
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4
Analysis of Atomic Force Microscopy Images of Crystal Originated “Particles” on Silicon Wafers Treated with NH4OH:H2O2:H2O Solution
by
Lee, W. P
.
,
Seow, W. S.
,
Yow, H. K.
,
Tou, T. Y.
Published 2001
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5
Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field
by
Lee, W. P
.
,
Teh, E. P.
,
Yow, H. K.
,
Choong, C. L.
,
Tou, T. Y.
Published 2005
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6
Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon
by
Lee, W. P
.
,
Teh, E. P.
,
Yow, H. K.
,
Choong, C. L.
,
Tou, T. Y.
Published 2004
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