Search Results - Keating, Adrian

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  1. 1
    Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

    Selective Oxidation and Carbonization by Laser Writing into Porous Silicon by Keating, Adrian, Sun, Xiao

    Published 2019
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  2. 2
    Micromachined microbeams made from porous silicon for dynamic and static mode sensing

    Micromachined microbeams made from porous silicon for dynamic and static mode sensing by Sun, Xiao, Parish, Giacinta, Keating, Adrian

    Published 2018
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  3. 3
    Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control

    Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control by Sun, Xiao, Parish, Giacinta, Keating, Adrian

    Published 2017
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  4. 4
    Stress control of porous silicon films for microelectromechanical systems

    Stress control of porous silicon films for microelectromechanical systems by Sun, Xiao, Keating, Adrian, Parish, Giacinta

    Published 2015
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  5. 5
    Released micromachined beams utilizing laterally uniform porosity porous silicon

    Released micromachined beams utilizing laterally uniform porosity porous silicon by Sun, Xiao, Keating, Adrian, Parish, Giacinta

    Published 2014
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  6. 6
    Stress control of porous silicon film for microelectromechanical systems

    Stress control of porous silicon film for microelectromechanical systems by Sun, Xiao, Keating, Adrian, Parish, Giacinta

    Published 2014
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