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MEMS/MOEMS : advances in photonic commmunications, sensing, metrology, packaging and assembly.
Published 2003
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Metrology, inspection, and process control for microlithography XVII.
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Opto-Ireland 2002 optical metrology, imaging, and machine vision
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Shearer, Andrew
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Murtagh, Fionn D.
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Mahon, James
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Whelan, Paul F. 1963-
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Microsystems engineering Metrology and inspection III
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Goreck, Christophe
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T - Technology
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