APA Citation

Badaruddin, M., Muhamad, M., & Rahman, S. (2011). Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition.

Chicago Style Citation

Badaruddin, M.R., M.R Muhamad, and S.A Rahman. Multi-phase Structured Silicon Carbon Nitride Thin Films Prepared By Hot-wire Chemical Vapour Deposition. 2011.

MLA Citation

Badaruddin, M.R., M.R Muhamad, and S.A Rahman. Multi-phase Structured Silicon Carbon Nitride Thin Films Prepared By Hot-wire Chemical Vapour Deposition. 2011.

Warning: These citations may not always be 100% accurate.