APA Citation

Ali, M. Y., Hung, N. P., Yuan, S., & Inasaki, I. (2001). Surface roughness of FIB sputtered silicon. Kluwer Academic Publishers (Springer).

Chicago Style Citation

Ali, Mohammad Yeakub, N. P. Hung, S. Yuan, and Ichiro Inasaki. Surface Roughness of FIB Sputtered Silicon. Kluwer Academic Publishers (Springer), 2001.

MLA Citation

Ali, Mohammad Yeakub, N. P. Hung, S. Yuan, and Ichiro Inasaki. Surface Roughness of FIB Sputtered Silicon. Kluwer Academic Publishers (Springer), 2001.

Warning: These citations may not always be 100% accurate.