APA Citation

Hung, N., Ali, M. Y., Fu, Y., Ong, N., & Tay, M. (2001). Surface integrity and removal rate of silicon sputtered with focused ion beam. Taylor and Francis Inc.

Chicago Style Citation

Hung, NguyenPhu, Mohammad Yeakub Ali, Yongqi Fu, NanShing Ong, and MengLeong Tay. Surface Integrity and Removal Rate of Silicon Sputtered With Focused Ion Beam. Taylor and Francis Inc, 2001.

MLA Citation

Hung, NguyenPhu, et al. Surface Integrity and Removal Rate of Silicon Sputtered With Focused Ion Beam. Taylor and Francis Inc, 2001.

Warning: These citations may not always be 100% accurate.